4/5/2011	11:06:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2011	11:06:53 AM	Recipe started at 11:06 AM
4/5/2011	11:06:53 AM	Helium valve closed
4/5/2011	11:06:53 AM	H2 valve closed
4/5/2011	11:06:53 AM	BCl3 valve closed
4/5/2011	11:06:53 AM	PH3 valve closed
4/5/2011	11:06:53 AM	SiCl4 pre valve closed
4/5/2011	11:06:53 AM	SiCl4 post valve closed
4/5/2011	11:06:53 AM	Main Vac valve closed
4/5/2011	11:06:53 AM	Bubbler valve closed
4/5/2011	11:06:53 AM	Bypass valve opened
4/5/2011	11:06:53 AM	Helium MFC set to  0.000000
4/5/2011	11:06:53 AM	H2 MFC set to  0.000000
4/5/2011	11:06:53 AM	BCl3 MFC set to  0.000000
4/5/2011	11:06:53 AM	PHl3 MFC set to  0.000000
4/5/2011	11:06:53 AM	SiCl4 MFC set to  0.000000
4/5/2011	11:06:53 AM	Bypass solenoid MFC set to  0.000000
4/5/2011	11:06:53 AM	Tube furnace set to 0
4/5/2011	11:06:54 AM	Helium valve closed
4/5/2011	11:06:54 AM	H2 valve closed
4/5/2011	11:06:54 AM	BCl3 valve closed
4/5/2011	11:06:54 AM	PH3 valve closed
4/5/2011	11:06:54 AM	SiCl4 pre valve closed
4/5/2011	11:06:54 AM	SiCl4 post valve closed
4/5/2011	11:06:54 AM	Bubbler valve closed
4/5/2011	11:06:54 AM	Main Vac valve opened
4/5/2011	11:06:54 AM	Bypass valve opened
4/5/2011	11:06:54 AM	Helium MFC set to  0.000000
4/5/2011	11:06:54 AM	H2 MFC set to  0.000000
4/5/2011	11:06:54 AM	BCl3 MFC set to  0.000000
4/5/2011	11:06:54 AM	PHl3 MFC set to  0.000000
4/5/2011	11:06:54 AM	SiCl4 MFC set to  0.000000
4/5/2011	11:06:54 AM	Bypass solenoid MFC set to  0.000000
4/5/2011	11:06:54 AM	Tube furnace set to 0
4/5/2011	11:06:54 AM	Run finished at 11:06 AM
4/5/2011	11:06:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2011	11:43:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2011	11:43:45 AM	Recipe started at 11:43 AM
4/5/2011	11:43:45 AM	H2 valve closed
4/5/2011	11:43:45 AM	BCl3 valve closed
4/5/2011	11:43:45 AM	PH3 valve closed
4/5/2011	11:43:45 AM	SiCl4 pre valve closed
4/5/2011	11:43:45 AM	SiCl4 post valve closed
4/5/2011	11:43:45 AM	Main Vac valve closed
4/5/2011	11:43:45 AM	Bypass valve closed
4/5/2011	11:43:45 AM	Bubbler valve closed
4/5/2011	11:43:45 AM	Helium valve opened
4/5/2011	11:43:45 AM	Helium MFC set to  500.000000
4/5/2011	11:43:45 AM	H2 MFC set to  0.000000
4/5/2011	11:43:45 AM	BCl3 MFC set to  0.000000
4/5/2011	11:43:45 AM	PHl3 MFC set to  0.000000
4/5/2011	11:43:45 AM	SiCl4 MFC set to  0.000000
4/5/2011	11:43:45 AM	Bypass solenoid MFC set to  0.000000
4/5/2011	11:43:45 AM	Tube furnace set to 0
4/5/2011	11:45:05 AM	Helium valve closed
4/5/2011	11:45:05 AM	H2 valve closed
4/5/2011	11:45:05 AM	BCl3 valve closed
4/5/2011	11:45:05 AM	PH3 valve closed
4/5/2011	11:45:05 AM	SiCl4 pre valve closed
4/5/2011	11:45:05 AM	SiCl4 post valve closed
4/5/2011	11:45:05 AM	Main Vac valve closed
4/5/2011	11:45:05 AM	Bypass valve closed
4/5/2011	11:45:05 AM	Bubbler valve closed
4/5/2011	11:45:05 AM	Helium MFC set to  0.000000
4/5/2011	11:45:05 AM	H2 MFC set to  0.000000
4/5/2011	11:45:05 AM	BCl3 MFC set to  0.000000
4/5/2011	11:45:05 AM	PHl3 MFC set to  0.000000
4/5/2011	11:45:05 AM	SiCl4 MFC set to  0.000000
4/5/2011	11:45:05 AM	Bypass solenoid MFC set to  0.000000
4/5/2011	11:45:05 AM	Tube furnace set to 0
4/5/2011	11:45:05 AM	Run finished at 11:45 AM
4/5/2011	11:45:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2011	11:47:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2011	11:47:22 AM	Recipe started at 11:47 AM
4/5/2011	11:47:22 AM	Helium valve closed
4/5/2011	11:47:22 AM	H2 valve closed
4/5/2011	11:47:22 AM	BCl3 valve closed
4/5/2011	11:47:22 AM	PH3 valve closed
4/5/2011	11:47:22 AM	SiCl4 pre valve closed
4/5/2011	11:47:22 AM	SiCl4 post valve closed
4/5/2011	11:47:22 AM	Main Vac valve closed
4/5/2011	11:47:22 AM	Bubbler valve closed
4/5/2011	11:47:22 AM	Bypass valve opened
4/5/2011	11:47:22 AM	Helium MFC set to  0.000000
4/5/2011	11:47:22 AM	H2 MFC set to  0.000000
4/5/2011	11:47:22 AM	BCl3 MFC set to  0.000000
4/5/2011	11:47:22 AM	PHl3 MFC set to  0.000000
4/5/2011	11:47:22 AM	SiCl4 MFC set to  0.000000
4/5/2011	11:47:22 AM	Bypass solenoid MFC set to  0.000000
4/5/2011	11:47:22 AM	Tube furnace set to 0
4/5/2011	11:47:53 AM	Helium valve closed
4/5/2011	11:47:53 AM	H2 valve closed
4/5/2011	11:47:53 AM	BCl3 valve closed
4/5/2011	11:47:53 AM	PH3 valve closed
4/5/2011	11:47:53 AM	SiCl4 pre valve closed
4/5/2011	11:47:53 AM	SiCl4 post valve closed
4/5/2011	11:47:53 AM	Bubbler valve closed
4/5/2011	11:47:53 AM	Main Vac valve opened
4/5/2011	11:47:53 AM	Bypass valve opened
4/5/2011	11:47:53 AM	Helium MFC set to  0.000000
4/5/2011	11:47:53 AM	H2 MFC set to  0.000000
4/5/2011	11:47:53 AM	BCl3 MFC set to  0.000000
4/5/2011	11:47:53 AM	PHl3 MFC set to  0.000000
4/5/2011	11:47:53 AM	SiCl4 MFC set to  0.000000
4/5/2011	11:47:53 AM	Bypass solenoid MFC set to  0.000000
4/5/2011	11:47:53 AM	Tube furnace set to 0
4/5/2011	11:47:54 AM	Run finished at 11:47 AM
4/5/2011	11:47:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2011	11:47:58 AM	Helium MFC set to  20.000000
4/5/2011	11:47:59 AM	Helium valve opened
4/5/2011	12:08:24 PM	Helium valve closed
4/5/2011	12:09:08 PM	Helium MFC set to  40.000000
4/5/2011	12:09:12 PM	Helium MFC set to  20.000000
4/5/2011	12:09:12 PM	Helium valve opened
4/5/2011	12:25:00 PM	Helium valve closed
4/5/2011	12:26:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/5/2011	12:26:16 PM	Recipe started at 12:26 PM
4/5/2011	12:26:16 PM	Helium valve closed
4/5/2011	12:26:16 PM	H2 valve closed
4/5/2011	12:26:16 PM	BCl3 valve closed
4/5/2011	12:26:16 PM	PH3 valve closed
4/5/2011	12:26:16 PM	SiCl4 pre valve closed
4/5/2011	12:26:16 PM	SiCl4 post valve closed
4/5/2011	12:26:16 PM	Main Vac valve closed
4/5/2011	12:26:16 PM	Bypass valve closed
4/5/2011	12:26:16 PM	Bubbler valve closed
4/5/2011	12:26:16 PM	Helium MFC set to  0.000000
4/5/2011	12:26:16 PM	H2 MFC set to  0.000000
4/5/2011	12:26:16 PM	BCl3 MFC set to  0.000000
4/5/2011	12:26:16 PM	PHl3 MFC set to  0.000000
4/5/2011	12:26:16 PM	SiCl4 MFC set to  0.000000
4/5/2011	12:26:16 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	12:26:16 PM	Tube furnace set to 0
4/5/2011	12:26:16 PM	Run finished at 12:26 PM
4/5/2011	12:26:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/5/2011	12:29:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2011	12:29:25 PM	Recipe started at 12:29 PM
4/5/2011	12:29:25 PM	Helium valve closed
4/5/2011	12:29:25 PM	H2 valve closed
4/5/2011	12:29:25 PM	BCl3 valve closed
4/5/2011	12:29:25 PM	PH3 valve closed
4/5/2011	12:29:25 PM	SiCl4 pre valve closed
4/5/2011	12:29:25 PM	SiCl4 post valve closed
4/5/2011	12:29:25 PM	Main Vac valve closed
4/5/2011	12:29:25 PM	Bubbler valve closed
4/5/2011	12:29:25 PM	Bypass valve opened
4/5/2011	12:29:25 PM	Helium MFC set to  0.000000
4/5/2011	12:29:25 PM	H2 MFC set to  0.000000
4/5/2011	12:29:25 PM	BCl3 MFC set to  0.000000
4/5/2011	12:29:25 PM	PHl3 MFC set to  0.000000
4/5/2011	12:29:25 PM	SiCl4 MFC set to  0.000000
4/5/2011	12:29:25 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	12:29:25 PM	Tube furnace set to 0
4/5/2011	12:29:26 PM	Helium valve closed
4/5/2011	12:29:26 PM	H2 valve closed
4/5/2011	12:29:26 PM	BCl3 valve closed
4/5/2011	12:29:26 PM	PH3 valve closed
4/5/2011	12:29:26 PM	SiCl4 pre valve closed
4/5/2011	12:29:26 PM	SiCl4 post valve closed
4/5/2011	12:29:26 PM	Bubbler valve closed
4/5/2011	12:29:26 PM	Main Vac valve opened
4/5/2011	12:29:26 PM	Bypass valve opened
4/5/2011	12:29:26 PM	Helium MFC set to  0.000000
4/5/2011	12:29:26 PM	H2 MFC set to  0.000000
4/5/2011	12:29:26 PM	BCl3 MFC set to  0.000000
4/5/2011	12:29:26 PM	PHl3 MFC set to  0.000000
4/5/2011	12:29:26 PM	SiCl4 MFC set to  0.000000
4/5/2011	12:29:26 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	12:29:26 PM	Tube furnace set to 0
4/5/2011	12:29:26 PM	Run finished at 12:29 PM
4/5/2011	12:29:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2011	12:30:00 PM	Helium MFC set to  50.000000
4/5/2011	12:30:00 PM	Helium valve opened
4/5/2011	12:30:16 PM	Helium valve closed
4/5/2011	12:30:55 PM	Recipe started at 12:30 PM
4/5/2011	12:30:55 PM	Helium valve closed
4/5/2011	12:30:55 PM	BCl3 valve closed
4/5/2011	12:30:55 PM	PH3 valve closed
4/5/2011	12:30:55 PM	SiCl4 pre valve closed
4/5/2011	12:30:55 PM	SiCl4 post valve closed
4/5/2011	12:30:55 PM	Main Vac valve closed
4/5/2011	12:30:55 PM	Bypass valve closed
4/5/2011	12:30:55 PM	Bubbler valve closed
4/5/2011	12:30:55 PM	H2 valve opened
4/5/2011	12:30:55 PM	Helium MFC set to  0.000000
4/5/2011	12:30:55 PM	H2 MFC set to  500.000000
4/5/2011	12:30:55 PM	BCl3 MFC set to  0.000000
4/5/2011	12:30:55 PM	PHl3 MFC set to  0.000000
4/5/2011	12:30:55 PM	SiCl4 MFC set to  0.000000
4/5/2011	12:30:55 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	12:30:55 PM	Tube furnace set to 0
4/5/2011	12:32:18 PM	Helium valve closed
4/5/2011	12:32:18 PM	BCl3 valve closed
4/5/2011	12:32:18 PM	PH3 valve closed
4/5/2011	12:32:18 PM	SiCl4 pre valve closed
4/5/2011	12:32:18 PM	SiCl4 post valve closed
4/5/2011	12:32:18 PM	Main Vac valve closed
4/5/2011	12:32:18 PM	Bypass valve closed
4/5/2011	12:32:18 PM	H2 valve opened
4/5/2011	12:32:18 PM	Bubbler valve opened
4/5/2011	12:32:18 PM	Helium MFC set to  0.000000
4/5/2011	12:32:18 PM	H2 MFC set to  500.000000
4/5/2011	12:32:18 PM	BCl3 MFC set to  0.000000
4/5/2011	12:32:18 PM	PHl3 MFC set to  0.000000
4/5/2011	12:32:18 PM	SiCl4 MFC set to  0.000000
4/5/2011	12:32:18 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	12:32:18 PM	Tube furnace set to 1000
4/5/2011	12:52:18 PM	Helium valve closed
4/5/2011	12:52:18 PM	BCl3 valve closed
4/5/2011	12:52:18 PM	PH3 valve closed
4/5/2011	12:52:18 PM	Main Vac valve closed
4/5/2011	12:52:18 PM	Bypass valve closed
4/5/2011	12:52:18 PM	H2 valve opened
4/5/2011	12:52:18 PM	SiCl4 pre valve opened
4/5/2011	12:52:18 PM	SiCl4 post valve opened
4/5/2011	12:52:18 PM	Bubbler valve opened
4/5/2011	12:52:18 PM	Helium MFC set to  0.000000
4/5/2011	12:52:18 PM	H2 MFC set to  500.000000
4/5/2011	12:52:18 PM	BCl3 MFC set to  0.000000
4/5/2011	12:52:18 PM	PHl3 MFC set to  0.000000
4/5/2011	12:52:18 PM	SiCl4 MFC set to  90.000000
4/5/2011	12:52:18 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	12:52:18 PM	Tube furnace set to 1000
4/5/2011	1:12:18 PM	H2 valve closed
4/5/2011	1:12:18 PM	BCl3 valve closed
4/5/2011	1:12:18 PM	PH3 valve closed
4/5/2011	1:12:18 PM	SiCl4 pre valve closed
4/5/2011	1:12:18 PM	SiCl4 post valve closed
4/5/2011	1:12:18 PM	Main Vac valve closed
4/5/2011	1:12:18 PM	Bypass valve closed
4/5/2011	1:12:18 PM	Helium valve opened
4/5/2011	1:12:18 PM	Bubbler valve opened
4/5/2011	1:12:18 PM	Helium MFC set to  500.000000
4/5/2011	1:12:18 PM	H2 MFC set to  0.000000
4/5/2011	1:12:18 PM	BCl3 MFC set to  0.000000
4/5/2011	1:12:18 PM	PHl3 MFC set to  0.000000
4/5/2011	1:12:18 PM	SiCl4 MFC set to  0.000000
4/5/2011	1:12:18 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	1:12:18 PM	Tube furnace set to 0
4/5/2011	1:39:31 PM	H2 valve closed
4/5/2011	1:39:31 PM	BCl3 valve closed
4/5/2011	1:39:31 PM	PH3 valve closed
4/5/2011	1:39:31 PM	SiCl4 pre valve closed
4/5/2011	1:39:31 PM	SiCl4 post valve closed
4/5/2011	1:39:31 PM	Main Vac valve closed
4/5/2011	1:39:31 PM	Bypass valve closed
4/5/2011	1:39:31 PM	Helium valve opened
4/5/2011	1:39:31 PM	Bubbler valve opened
4/5/2011	1:39:31 PM	Helium MFC set to  500.000000
4/5/2011	1:39:31 PM	H2 MFC set to  0.000000
4/5/2011	1:39:31 PM	BCl3 MFC set to  0.000000
4/5/2011	1:39:31 PM	PHl3 MFC set to  0.000000
4/5/2011	1:39:31 PM	SiCl4 MFC set to  0.000000
4/5/2011	1:39:31 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	1:39:31 PM	Tube furnace set to 0
4/5/2011	1:39:31 PM	Helium valve closed
4/5/2011	1:39:31 PM	H2 valve closed
4/5/2011	1:39:31 PM	BCl3 valve closed
4/5/2011	1:39:31 PM	PH3 valve closed
4/5/2011	1:39:31 PM	SiCl4 pre valve closed
4/5/2011	1:39:31 PM	SiCl4 post valve closed
4/5/2011	1:39:31 PM	Main Vac valve closed
4/5/2011	1:39:31 PM	Bypass valve closed
4/5/2011	1:39:31 PM	Bubbler valve closed
4/5/2011	1:39:31 PM	Helium MFC set to  0.000000
4/5/2011	1:39:31 PM	H2 MFC set to  0.000000
4/5/2011	1:39:31 PM	BCl3 MFC set to  0.000000
4/5/2011	1:39:31 PM	PHl3 MFC set to  0.000000
4/5/2011	1:39:31 PM	SiCl4 MFC set to  0.000000
4/5/2011	1:39:31 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	1:39:32 PM	Tube furnace set to 0
4/5/2011	1:39:32 PM	Run finished at 1:39 PM
4/5/2011	1:41:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2011	1:41:41 PM	Recipe started at 1:41 PM
4/5/2011	1:41:41 PM	Helium valve closed
4/5/2011	1:41:41 PM	H2 valve closed
4/5/2011	1:41:41 PM	BCl3 valve closed
4/5/2011	1:41:41 PM	PH3 valve closed
4/5/2011	1:41:41 PM	SiCl4 pre valve closed
4/5/2011	1:41:41 PM	SiCl4 post valve closed
4/5/2011	1:41:41 PM	Main Vac valve closed
4/5/2011	1:41:41 PM	Bubbler valve closed
4/5/2011	1:41:41 PM	Bypass valve opened
4/5/2011	1:41:41 PM	Helium MFC set to  0.000000
4/5/2011	1:41:41 PM	H2 MFC set to  0.000000
4/5/2011	1:41:41 PM	BCl3 MFC set to  0.000000
4/5/2011	1:41:41 PM	PHl3 MFC set to  0.000000
4/5/2011	1:41:41 PM	SiCl4 MFC set to  0.000000
4/5/2011	1:41:41 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	1:41:41 PM	Tube furnace set to 0
4/5/2011	1:42:12 PM	Helium valve closed
4/5/2011	1:42:12 PM	H2 valve closed
4/5/2011	1:42:12 PM	BCl3 valve closed
4/5/2011	1:42:12 PM	PH3 valve closed
4/5/2011	1:42:12 PM	SiCl4 pre valve closed
4/5/2011	1:42:12 PM	SiCl4 post valve closed
4/5/2011	1:42:12 PM	Bubbler valve closed
4/5/2011	1:42:12 PM	Main Vac valve opened
4/5/2011	1:42:12 PM	Bypass valve opened
4/5/2011	1:42:12 PM	Helium MFC set to  0.000000
4/5/2011	1:42:12 PM	H2 MFC set to  0.000000
4/5/2011	1:42:12 PM	BCl3 MFC set to  0.000000
4/5/2011	1:42:12 PM	PHl3 MFC set to  0.000000
4/5/2011	1:42:12 PM	SiCl4 MFC set to  0.000000
4/5/2011	1:42:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2011	1:42:12 PM	Tube furnace set to 0
4/5/2011	1:42:12 PM	Run finished at 1:42 PM
4/5/2011	1:42:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
